Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10161039 | Apparatus and method for spatial atomic layer deposition | Ching-Lun Lai, Pei-Ren Jeng, Tze-Liang Lee | 2018-12-25 |
| 9873943 | Apparatus and method for spatial atomic layer deposition | Ching-Lun Lai, Pei-Ren Jeng, Tze-Liang Lee | 2018-01-23 |