Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10090207 | Multi-point chemical mechanical polishing end point detection system and method of using | Jiann Lih Wu, Soon-Kang Huang, Chi-Ming Yang | 2018-10-02 |
| 10035929 | pH-adjuster free chemical mechanical planarization slurry | Shu-Hao Huang, Horng-Huei Tseng, Chi-Ming Yang | 2018-07-31 |
| 9958424 | Method of identifying airborne molecular contamination source | Tzu-Sou Chuang, Cheng-Lung Chou, Chi-Ming Yang, Chin-Hsiang Lin | 2018-05-01 |