Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10107490 | Configurable liquid precursor vaporizer | Colin F. Smith, Harald te Nijenhuis, Jeffrey E. Lorelli, Kevin Madrigal, Shawn M. Hamilton +1 more | 2018-10-23 |
| 10074765 | Systems, method and apparatus for curing conductive paste | James Zu-Yi Liu | 2018-09-11 |
| 10023959 | Anti-transient showerhead | Colin F. Smith, Shawn M. Hamilton | 2018-07-17 |
| 10014201 | Magnetic wafer gripper | — | 2018-07-03 |
| 9982341 | Modular vaporizer | Alan M. Schoepp, Colin F. Smith | 2018-05-29 |
| 9863041 | Internally heated porous filter for defect reduction with liquid or solid precursors | Colin F. Smith, Kevin Madrigal, Shawn M. Hamilton | 2018-01-09 |