Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10107490 | Configurable liquid precursor vaporizer | Harald te Nijenhuis, Jeffrey E. Lorelli, Edward Sung, Kevin Madrigal, Shawn M. Hamilton +1 more | 2018-10-23 |
| 10023959 | Anti-transient showerhead | Edward Sung, Shawn M. Hamilton | 2018-07-17 |
| 9982341 | Modular vaporizer | Alan M. Schoepp, Edward Sung | 2018-05-29 |
| 9863041 | Internally heated porous filter for defect reduction with liquid or solid precursors | Edward Sung, Kevin Madrigal, Shawn M. Hamilton | 2018-01-09 |