Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10107490 | Configurable liquid precursor vaporizer | Colin F. Smith, Harald te Nijenhuis, Jeffrey E. Lorelli, Edward Sung, Shawn M. Hamilton +1 more | 2018-10-23 |
| 9863041 | Internally heated porous filter for defect reduction with liquid or solid precursors | Colin F. Smith, Edward Sung, Shawn M. Hamilton | 2018-01-09 |