Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153192 | Electrostatic chuck device | Shinichi Maeta, Mamoru Kosakai, Hitoshi Kouno | 2018-12-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153192 | Electrostatic chuck device | Shinichi Maeta, Mamoru Kosakai, Hitoshi Kouno | 2018-12-11 |