Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153192 | Electrostatic chuck device | Shinichi Maeta, Yukio Miura, Hitoshi Kouno | 2018-12-11 |
| 10079167 | Electrostatic chucking device | — | 2018-09-18 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153192 | Electrostatic chuck device | Shinichi Maeta, Yukio Miura, Hitoshi Kouno | 2018-12-11 |
| 10079167 | Electrostatic chucking device | — | 2018-09-18 |