Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153192 | Electrostatic chuck device | Shinichi Maeta, Yukio Miura, Mamoru Kosakai | 2018-12-11 |
| 10068790 | Electrostatic chuck device | Fumihiro Gobou | 2018-09-04 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10153192 | Electrostatic chuck device | Shinichi Maeta, Yukio Miura, Mamoru Kosakai | 2018-12-11 |
| 10068790 | Electrostatic chuck device | Fumihiro Gobou | 2018-09-04 |