Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10048142 | Evaluation method for bulk silicon carbide single crystals and reference silicon carbide single crystal used in said method | Masashi Nakabayashi | 2018-08-14 |
| 10031089 | Method for evaluating internal stress of silicon carbide monocrystalline wafer and method for predicting warpage in silicone carbide monocrystalline wafer | Masashi Nakabayashi, Kota Shimomura, Yukio Nagahata | 2018-07-24 |