Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10031089 | Method for evaluating internal stress of silicon carbide monocrystalline wafer and method for predicting warpage in silicone carbide monocrystalline wafer | Kiyoshi Kojima, Masashi Nakabayashi, Yukio Nagahata | 2018-07-24 |