Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10160089 | Polishing apparatus | — | 2018-12-25 |
| 10138548 | Film thickness measuring device, polishing apparatus, film thickness measuring method and polishing method | — | 2018-11-27 |
| 10131762 | Black iron oxide for use with cosmetics, production method thereof, and cosmetic materials comprising the same | Masayasu Morishita, Hiroaki Uchida | 2018-11-20 |
| 10008380 | Substrate drying apparatus, substrate drying method and control program | Tomoatsu Ishibashi, Takahiro Ogawa, Kenichi Sugita, Shinji Kajita, Koichi Fukaya | 2018-06-26 |
| 9951863 | Transmission | Toru Iwasaki, Mitsuhiro Nakamura, Hiroyuki Yoneyama | 2018-04-24 |
| 9943943 | Method and apparatus for monitoring a polishing surface of a polishing pad used in polishing apparatus | Hiroyuki Shinozaki, Takahiro SHIMANO, Akira Imamura | 2018-04-17 |
| 9921419 | Annular device | Tsutomu Fukushima | 2018-03-20 |