Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10086495 | Dresser disk cleaning brush, cleaning apparatus, and cleaning method | — | 2018-10-02 |
| 10029343 | Polishing apparatus | — | 2018-07-24 |
| 10032656 | Substrate processing apparatus | — | 2018-07-24 |
| 10016871 | Polishing apparatus and controlling the same | — | 2018-07-10 |
| 9962804 | Polishing apparatus, method for controlling the same, and method for outputting a dressing condition | — | 2018-05-08 |
| 9943943 | Method and apparatus for monitoring a polishing surface of a polishing pad used in polishing apparatus | Takahiro SHIMANO, Akira Imamura, Akira Nakamura | 2018-04-17 |
| 9908212 | Polishing table replacement apparatus, polishing table replacement method, and apparatus for replacing a component of semiconductor-device manufacturing machine | Shuichi Suemasa, Yutaka Kobayashi | 2018-03-06 |