Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163664 | Substrate cleaning apparatus and substrate cleaning method | — | 2018-12-25 |
| 10090189 | Substrate cleaning apparatus comprising a second jet nozzle surrounding a first jet nozzle | — | 2018-10-02 |
| D822926 | Sponge for substrate cleaning | — | 2018-07-10 |
| 10008380 | Substrate drying apparatus, substrate drying method and control program | Takahiro Ogawa, Kenichi Sugita, Shinji Kajita, Koichi Fukaya, Akira Nakamura | 2018-06-26 |
| 10002778 | Substrate cleaning apparatus | — | 2018-06-19 |