Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163663 | Substrate processing apparatus, exhaust system and method of manufacturing semiconductor device | Toshihiko Yonejima, Masanori OKUNO, Masakazu Sakata, Hiroki OKAMIYA, Takeshi Kasai +6 more | 2018-12-25 |
| 10147687 | Semiconductor device and method of producing semiconductor device | Fumio Ushida, Shigetoshi Takeda, Tomoharu Awaya, Koji Banno, Takayoshi Minami | 2018-12-04 |
| 9881878 | Semiconductor device and method of producing semiconductor device | Fumio Ushida, Shigetoshi Takeda, Tomoharu Awaya, Koji Banno, Takayoshi Minami | 2018-01-30 |