Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163663 | Substrate processing apparatus, exhaust system and method of manufacturing semiconductor device | Toshihiko Yonejima, Masakazu Sakata, Hiroki OKAMIYA, Takeshi Kasai, Katsuaki NOGAMI +6 more | 2018-12-25 |
| 10132757 | Substrate processing device | Hisaki Kataoka, Tomoyuki Miyada | 2018-11-20 |