Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163663 | Substrate processing apparatus, exhaust system and method of manufacturing semiconductor device | Toshihiko Yonejima, Masanori OKUNO, Masakazu Sakata, Hiroki OKAMIYA, Katsuaki NOGAMI +6 more | 2018-12-25 |