Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10146122 | Halftone phase shift photomask blank and making method | Takuro Kosaka, Hideo Kaneko | 2018-12-04 |
| 10120274 | Method of manufacturing photomask blank and photomask blank | Souichi Fukaya | 2018-11-06 |
| 10078260 | Phase shift mask blank, phase shift mask, and blank preparing method | Takuro Kosaka | 2018-09-18 |
| 9927695 | Halftone phase shift mask blank, halftone phase shift mask, and pattern exposure method | Takuro Kosaka | 2018-03-27 |
| 9880459 | Photomask blank and method for preparing photomask | Kouhei Sasamoto, Souichi Fukaya | 2018-01-30 |
| 9864266 | Photomask blank | Kouhei Sasamoto | 2018-01-09 |