Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10146122 | Halftone phase shift photomask blank and making method | Yukio Inazuki, Hideo Kaneko | 2018-12-04 |
| 10078260 | Phase shift mask blank, phase shift mask, and blank preparing method | Yukio Inazuki | 2018-09-18 |
| 9927695 | Halftone phase shift mask blank, halftone phase shift mask, and pattern exposure method | Yukio Inazuki | 2018-03-27 |
| 9897911 | Halftone phase shift photomask blank, making method, and halftone phase shift photomask | — | 2018-02-20 |