Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10146122 | Halftone phase shift photomask blank and making method | Takuro Kosaka, Yukio Inazuki | 2018-12-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10146122 | Halftone phase shift photomask blank and making method | Takuro Kosaka, Yukio Inazuki | 2018-12-04 |