Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10103071 | Pattern inspection methods and methods of fabricating reticles using the same via directing charged particle beams through discharge layers | Eokbong KIM, Jin Sung Choi, Kijung Son | 2018-10-16 |
| 10065402 | Method of manufacturing pellicle assembly and method of photomask assembly including the same | Byung-Gook Kim, Hwan Chul Jeon, Ji-Beom Yoo, Dong Wook Shin, Taesung Kim +1 more | 2018-09-04 |
| 10001700 | Pellicle film including graphite-containing thin film for extreme ultraviolet lithography | Ji-Beom Yoo, Seul Gi Kim, Sang-Jin Cho, Myung-shik Chang, Jang-dong You | 2018-06-19 |