Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10001700 | Pellicle film including graphite-containing thin film for extreme ultraviolet lithography | Mun Ja Kim, Ji-Beom Yoo, Seul Gi Kim, Sang-Jin Cho, Myung-shik Chang | 2018-06-19 |