Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10065402 | Method of manufacturing pellicle assembly and method of photomask assembly including the same | Mun Ja Kim, Byung-Gook Kim, Hwan Chul Jeon, Dong Wook Shin, Taesung Kim +1 more | 2018-09-04 |
| 10001700 | Pellicle film including graphite-containing thin film for extreme ultraviolet lithography | Mun Ja Kim, Seul Gi Kim, Sang-Jin Cho, Myung-shik Chang, Jang-dong You | 2018-06-19 |