Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10068324 | 3D profiling system of semiconductor chip and method for operating the same | Jung Soo Kim, Jin Kwan Kim, Yu-Sin Yang, Soo Seok Lee | 2018-09-04 |
| 9939388 | Apparatus for inspecting wafer | Choon-Shik Leem, Woo-Jin Jung | 2018-04-10 |
| 9934939 | Scanning electron microscope system capable of measuring in-cell overlay offset using high-energy electron beam and method thereof | Min Kook Kim, Woo-Seok Ko, Yu-Sin Yang, Sang-Kil Lee | 2018-04-03 |
| 9897552 | Optical transformation module and optical measurement system, and method of manufacturing a semiconductor device using optical transformation module and optical measurement system | Tae-Joong Kim, Yong-Deok Jeong, Kwang Soo Kim, Byeong Hwan Jeon, Yu-Sin Yang +1 more | 2018-02-20 |
| 9892983 | Apparatus for forming a thin layer and method of forming a thin layer on a substrate using the same | Min Kook Kim, Bang-Won Kim, Yu-Sin Yang, Young-Jee Yoon, Sang-Kil Lee +1 more | 2018-02-13 |