Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9934939 | Scanning electron microscope system capable of measuring in-cell overlay offset using high-energy electron beam and method thereof | Woo-Seok Ko, Yu-Sin Yang, Sang-Kil Lee, Chung-Sam Jun | 2018-04-03 |
| 9892983 | Apparatus for forming a thin layer and method of forming a thin layer on a substrate using the same | Bang-Won Kim, Yu-Sin Yang, Young-Jee Yoon, Sang-Kil Lee, Yoo Seok Jang +1 more | 2018-02-13 |