Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10001444 | Surface inspecting method | Kang-Woong Ko, Sung Yoon Ryu, Young-Hoon Sohn, Gil-woo Song, Tae-Heung Ahn +6 more | 2018-06-19 |
| 9983144 | Plasma light source and inspection apparatus including the same | Kohei Hashimoto, Nobuyuki Kimura, Wook Kim | 2018-05-29 |
| 9903705 | Apparatus for focus control and method for manufacturing semiconductor device | Kwang Soo Kim, Harutaka Sekiya, Kwang-Jun Yoon, Sung Won Park, Young-Duk Kim +1 more | 2018-02-27 |
| 9897552 | Optical transformation module and optical measurement system, and method of manufacturing a semiconductor device using optical transformation module and optical measurement system | Tae-Joong Kim, Yong-Deok Jeong, Kwang Soo Kim, Yu-Sin Yang, Sang-Kil Lee +1 more | 2018-02-20 |