Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10138547 | Substrate carrying apparatus and sputtering device comprising the same | Xu Shi, Dongqing Li | 2018-11-27 |
| 10120215 | Apparatus for carrying substrate by off-line vacuum suction and method for transporting substrate | Xu Shi, Zhilong Xu, Xiaojun Wang, Dongqing Li, Shutong Huang +2 more | 2018-11-06 |