Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10138547 | Substrate carrying apparatus and sputtering device comprising the same | Jun Liu, Dongqing Li | 2018-11-27 |
| 10120215 | Apparatus for carrying substrate by off-line vacuum suction and method for transporting substrate | Zhilong Xu, Jun Liu, Xiaojun Wang, Dongqing Li, Shutong Huang +2 more | 2018-11-06 |
| 10087015 | Roller assembly and transmission device | Zhilong Xu | 2018-10-02 |