Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10120215 | Apparatus for carrying substrate by off-line vacuum suction and method for transporting substrate | Xu Shi, Zhilong Xu, Jun Liu, Xiaojun Wang, Dongqing Li +2 more | 2018-11-06 |