Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10144134 | Enclosure for a target processing machine | Joep Gerard Vijverberg, Laurens Plandsoen, Bas van Gelder, Guido De Boer | 2018-12-04 |
| 10087019 | Load lock system and method for transferring substrates in a lithography system | Sjoerd Hesdahl, Jan Pieter Roelof Jongeneel | 2018-10-02 |