Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10144134 | Enclosure for a target processing machine | Joep Gerard Vijverberg, Laurens Plandsoen, Bas van Gelder, Michel Pieter Dansberg | 2018-12-04 |
| 10054863 | Method of determining a position of a substrate in a lithography system, substrate for use in such a method, and lithography system for carrying out such method | Niels Vergeer | 2018-08-21 |