Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10087019 | Load lock system and method for transferring substrates in a lithography system | Michel Pieter Dansberg, Sjoerd Hesdahl | 2018-10-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10087019 | Load lock system and method for transferring substrates in a lithography system | Michel Pieter Dansberg, Sjoerd Hesdahl | 2018-10-02 |