Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10036964 | Prediction based chucking and lithography control optimization | Bin-Ming Benjamin Tsai, Oreste Donzella, Pradeep Vukkadala | 2018-07-31 |
| 10025894 | System and method to emulate finite element model based prediction of in-plane distortions due to semiconductor wafer chucking | Pradeep Vukkadala, Sathish Veeraraghavan, Haiguang Chen, Michael D. Kirk | 2018-07-17 |
| 9865047 | Systems and methods for effective pattern wafer surface measurement and analysis using interferometry tool | Haiguang Chen, Enrique Chavez, Sathish Veeraraghavan | 2018-01-09 |