Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10113030 | Resist material and pattern forming method using same | Kei Kobayashi | 2018-10-30 |
| 10018915 | Pattern forming method | Kazuto Matsuki, Ryoichi Suzuki, Shinichi Ito | 2018-07-10 |
| 9927376 | Template defect inspection method | Tomoaki Sawabe, Shinobu Sugimura, Ryosuke Yamamoto | 2018-03-27 |
| 9922991 | Semiconductor memory device and method for manufacturing same | Tetsuya Kamigaki, Isahiro Hasegawa, Shinichi Ito, Soichi Inoue, Tatsuhiko Higashiki +2 more | 2018-03-20 |
| 9894271 | Pattern inspection apparatus and pattern inspection method | Ryoji Yoshikawa, Tatsuhiko Higashiki, Takashi Hirano | 2018-02-13 |