Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10090163 | Inorganic film-forming composition for multilayer resist processes, and pattern-forming method | Hisashi Nakagawa, Tatsuya Sakai, Shunsuke Kurita, Satoshi Dei, Kazunori Takanashi +1 more | 2018-10-02 |