Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9899635 | System for depositing one or more layers on a substrate supported by a carrier and method using the same | Stefan Bangert, Jose Manuel DIEGUEZ-CAMPO, Dieter Haas | 2018-02-20 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9899635 | System for depositing one or more layers on a substrate supported by a carrier and method using the same | Stefan Bangert, Jose Manuel DIEGUEZ-CAMPO, Dieter Haas | 2018-02-20 |