Issued Patents 2018
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10035696 | MEMS component including a diaphragm element which is attached via a spring structure to the component layer structure | Fabian Purkl, Michael Stumber, Ricardo Ehrenpfordt, Benedikt Stein, Christoph Schelling | 2018-07-31 |
| 9998828 | MEMS microphone element | — | 2018-06-12 |
| 9945669 | Rotation rate sensor and a method for operating a rotation rate sensor | Thorsten Balslink, Benjamin Schmidt, Ralf Ameling, Mirko Hattass, Burkhard Kuhlmann +1 more | 2018-04-17 |
| 9936298 | MEMS component including a sound-pressure-sensitive diaphragm element and piezosensitive signal detection | Thomas Buck, Fabian Purkl, Michael Stumber, Ricardo Ehrenpfordt, Benedikt Stein +1 more | 2018-04-03 |
| 9914636 | MEMS component including a sound-pressure-sensitive diaphragm element | Thomas Buck, Fabian Purkl, Michael Stumber, Benedikt Stein, Christoph Schelling | 2018-03-13 |