Issued Patents 2018
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10035696 | MEMS component including a diaphragm element which is attached via a spring structure to the component layer structure | Michael Stumber, Ricardo Ehrenpfordt, Rolf Scheben, Benedikt Stein, Christoph Schelling | 2018-07-31 |
| 10006810 | Method to modulate the sensitivity of a bolometer via negative interference | Thomas Rocznik, Gary O'Brien, Ando Feyh, Bongsang Kim, Ashwin Samarao +1 more | 2018-06-26 |
| 9945727 | Resistive switching for MEMS devices | Ashwin Samarao, Gary O'Brien, Ando Feyh, Gary Yama | 2018-04-17 |
| 9936298 | MEMS component including a sound-pressure-sensitive diaphragm element and piezosensitive signal detection | Thomas Buck, Michael Stumber, Ricardo Ehrenpfordt, Rolf Scheben, Benedikt Stein +1 more | 2018-04-03 |
| 9914636 | MEMS component including a sound-pressure-sensitive diaphragm element | Thomas Buck, Michael Stumber, Rolf Scheben, Benedikt Stein, Christoph Schelling | 2018-03-13 |
| 9903763 | Titanium nitride for MEMS bolometers | Ashwin Samarao, Gary O'Brien, Ando Feyh, Gary Yama | 2018-02-27 |
| 9863901 | Semiconductor sensor having a suspended structure and method of forming a semiconductor sensor having a suspended structure | Ando Feyh, Gary O'Brien, Ashwin Samarao, Gary Yama | 2018-01-09 |