Issued Patents 2018
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10035696 | MEMS component including a diaphragm element which is attached via a spring structure to the component layer structure | Fabian Purkl, Michael Stumber, Ricardo Ehrenpfordt, Rolf Scheben, Christoph Schelling | 2018-07-31 |
| 10000374 | MEMS component | Christoph Schelling, Michael Stumber | 2018-06-19 |
| 9936298 | MEMS component including a sound-pressure-sensitive diaphragm element and piezosensitive signal detection | Thomas Buck, Fabian Purkl, Michael Stumber, Ricardo Ehrenpfordt, Rolf Scheben +1 more | 2018-04-03 |
| 9914636 | MEMS component including a sound-pressure-sensitive diaphragm element | Thomas Buck, Fabian Purkl, Michael Stumber, Rolf Scheben, Christoph Schelling | 2018-03-13 |