Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163630 | Pre-clean of silicon germanium for pre-metal contact at source and drain and pre-high k at channel | Bo Zheng, Avgerinos V. Gelatos, Anshul Ashok Vyas | 2018-12-25 |
| 9960275 | Method of fabricating air-gap spacer for N7/N5 finFET and beyond | Chih-Yang Chang, Tatsuya Sato, Nam Sung Kim, Shiyu Sun, Bingxi Wood | 2018-05-01 |