Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10025194 | Exposure apparatus, exposure method, and method for producing device | Hisashi Nishinaga, Ikuo Hikima, Mitsunori Toyoda, Masahiro Nakagawa, Tsuneyuki Hagiwara +3 more | 2018-07-17 |
| 10007194 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method | Koji Shigematsu, Hiroyuki Hirota, Tomoyuki Matsuyama | 2018-06-26 |
| 9857599 | Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method | — | 2018-01-02 |