Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10025194 | Exposure apparatus, exposure method, and method for producing device | Hisashi Nishinaga, Ikuo Hikima, Masahiro Nakagawa, Tsuneyuki Hagiwara, Yasushi Mizuno +3 more | 2018-07-17 |
| 9885872 | Illumination optical apparatus, exposure apparatus, and exposure method with optical integrator and polarization member that changes polarization state of light | — | 2018-02-06 |