Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10101666 | Illumination optical apparatus, exposure apparatus, and device manufacturing method | — | 2018-10-16 |
| 10007194 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method | Osamu Tanitsu, Koji Shigematsu, Tomoyuki Matsuyama | 2018-06-26 |