Issued Patents 2018
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10012897 | Planarized extreme ultraviolet lithography blank with absorber and manufacturing system therefor | Vinayak Vishwanath Hassan, Cara Beasley, Ralf Hofmann | 2018-07-03 |
| 10012908 | Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereof | Ralf Hofmann, Vinayak Vishwanath Hassan, Cara Beasley | 2018-07-03 |
| 9915621 | Extreme ultraviolet (EUV) substrate inspection system with simplified optics and method of manufacturing thereof | Christopher Dennis Bencher, Christopher G. Talbot, John Christopher Moran | 2018-03-13 |
| 9905418 | Growing graphene on substrates | Cara Beasley, Ralf Hofmann | 2018-02-27 |
| 9870935 | Monitoring system for deposition and method of operation thereof | Edward W. Budiarto, Ralf Hofmann, Thomas Nowak, Todd Egan, Mehdi Vaez-Iravani | 2018-01-16 |