Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10012897 | Planarized extreme ultraviolet lithography blank with absorber and manufacturing system therefor | Majeed A. Foad, Cara Beasley, Ralf Hofmann | 2018-07-03 |
| 10012908 | Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereof | Ralf Hofmann, Cara Beasley, Majeed A. Foad | 2018-07-03 |