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Model-based process simulation systems and methods |
Yu Cao, Wenjin Shao, Ronaldus Johannes Gijsbertus Goossens, James Patrick Koonmen |
2018-11-27 |
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Methods and systems for parameter-sensitive and orthogonal gauge design for lithography calibration |
Yu Cao, Hanying Feng, Wenjin Shao |
2018-07-17 |
| 10007192 |
Computational process control |
Yu Cao, James Patrick Koonmen |
2018-06-26 |
| 9953127 |
Fast freeform source and mask co-optimization method |
Luoqi Chen, Yu Cao |
2018-04-24 |
| 9921485 |
Method of performing model-based scanner tuning |
Yu Cao |
2018-03-20 |
| 9912762 |
Method for displaying splash screen content, terminal, content server, and system therefor |
Jing Zhang, Chen Zhang, Danzhi Chen, Peng Dong, Yufei Liu +5 more |
2018-03-06 |