Issued Patents 2018
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10025198 | Smart selection and/or weighting of parameters for lithographic process simulation | Yu Cao, Wenjin Shao, Fei Du, Martin Snajdr | 2018-07-17 |
| 10025885 | Methods and systems for parameter-sensitive and orthogonal gauge design for lithography calibration | Jun Ye, Yu Cao, Wenjin Shao | 2018-07-17 |