Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10137643 | Model-based process simulation systems and methods | Yu Cao, Ronaldus Johannes Gijsbertus Goossens, Jun Ye, James Patrick Koonmen | 2018-11-27 |
| 10025198 | Smart selection and/or weighting of parameters for lithographic process simulation | Yu Cao, Hanying Feng, Fei Du, Martin Snajdr | 2018-07-17 |
| 10025885 | Methods and systems for parameter-sensitive and orthogonal gauge design for lithography calibration | Jun Ye, Yu Cao, Hanying Feng | 2018-07-17 |