Issued Patents 2018
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10109488 | Phosphorus or arsenic ion implantation utilizing enhanced source techniques | Oleg Byl, Sharad N. Yedave, Barry Lewis Chambers, Ying Tang | 2018-10-23 |
| 9996090 | Preparation of high pressure BF3/H2 mixtures | Oleg Byl | 2018-06-12 |
| 9991095 | Ion source cleaning in semiconductor processing systems | Sharad N. Yedave, Oleg Byl, Robert Kaim, David Eldridge, Lin Feng +3 more | 2018-06-05 |
| 9960042 | Carbon dopant gas and co-flow for implant beam and source life performance improvement | Oleg Byl, Edward A. Sturm, Ying Tang, Sharad N. Yedave, Steven G. Sergi +1 more | 2018-05-01 |
| 9938156 | B2F4 manufacturing process | Oleg Byl, Edward E. Jones, Chiranjeevi Pydi | 2018-04-10 |
| 9897257 | Anti-spike pressure management of pressure-regulated fluid storage and delivery vessels | Joseph R. Despres, Edward E. Jones, Matthew B. Donatucci, Chiranjeevi Pydi, Edward A. Sturm +2 more | 2018-02-20 |