Issued Patents 2018
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10109488 | Phosphorus or arsenic ion implantation utilizing enhanced source techniques | Oleg Byl, Joseph D. Sweeney, Barry Lewis Chambers, Ying Tang | 2018-10-23 |
| 9991095 | Ion source cleaning in semiconductor processing systems | Joseph D. Sweeney, Oleg Byl, Robert Kaim, David Eldridge, Lin Feng +3 more | 2018-06-05 |
| 9960042 | Carbon dopant gas and co-flow for implant beam and source life performance improvement | Oleg Byl, Edward A. Sturm, Ying Tang, Joseph D. Sweeney, Steven G. Sergi +1 more | 2018-05-01 |