Issued Patents 2018
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9960042 | Carbon dopant gas and co-flow for implant beam and source life performance improvement | Oleg Byl, Edward A. Sturm, Ying Tang, Sharad N. Yedave, Joseph D. Sweeney +1 more | 2018-05-01 |